Boron trichloride (BCl3) is an inorganic compound commonly used in dry etching and chemical vapor deposition (CVD) processes in semiconductor manufacturing. It is a colorless gas with a strong pungent odor at room temperature and is sensitive to humid air because it hydrolyzes to produce hydrochloric acid and boric acid.

Applications of Boron Trichloride

In the semiconductor industry, Boron trichloride is mainly used for dry etching of aluminum and as a dopant to form P-type regions on silicon wafers. It can also be used to etch materials such as GaAs, Si, AlN, and as a boron source in certain specific applications. In addition, Boron trichloride is widely used in metal processing, glass industry, chemical analysis and laboratory research.

Safety of Boron Trichloride

Boron trichloride is corrosive and toxic and can cause serious damage to the eyes and skin. It hydrolyzes in humid air to release toxic hydrogen chloride gas. Therefore, appropriate safety measures need to be taken when handling Boron trichloride, including wearing protective clothing, goggles and respiratory protection equipment, and operating in a well-ventilated environment.