Laser gas

Laser gas is mainly used for laser annealing and lithography gas in the electronics industry. Benefiting from the innovation of mobile phone screens and the expansion of application areas, the scale of the low-temperature polysilicon market will be further expanded, and the laser annealing process has significantly improved the performance of TFTs. Among the neon, fluorine, and argon gases used in the ArF excimer laser for manufacturing semiconductors, neon accounts for more than 96% of the laser gas mixture. With the refinement of semiconductor technology, the use of excimer lasers has increased, and the introduction of double exposure technology has led to a sharp increase in the demand for neon gas consumed by ArF excimer lasers. Benefiting from the promotion of the localization of electronic specialty gases, domestic manufacturers will have a better market growth space in the future.

Lithography machine is the core equipment of semiconductor manufacturing. Lithography defines the size of transistors. The coordinated development of the lithography industry chain is the key to the breakthrough of lithography machine. The matching semiconductor materials such as photoresist, photolithography gas, photomask, and coating and developing equipment have high technological content. Lithography gas is the gas that the lithography machine generates deep ultraviolet laser. Different lithography gases can produce light sources of different wavelengths, and their wavelength directly affects the resolution of the lithography machine, which is one of the cores of the lithography machine. In 2020, the total global sales of lithography machines will be 413 units, of which ASML sales 258 units accounted for 62%, Canon sales 122 units accounted for 30%, and Nikon sales 33 units accounted for 8%.