Silane is a compound of silicon and hydrogen, and is a general term for a series of compounds. Silane mainly includes monosilane (SiH4), disilane (Si2H6) and some higher-level silicon hydrogen compounds, with the general formula SinH2n+2. However, in actual production, we generally refer to monosilane (chemical formula SiH4) as “silane”.

Electronic-grade silane gas is mainly obtained by various reaction distillation and purification of silicon powder, hydrogen, silicon tetrachloride, catalyst, etc. Silane with a purity of 3N to 4N is called industrial-grade silane, and silane with a purity of more than 6N is called electronic-grade silane gas.

As a gas source for carrying silicon components, silane gas has become an important special gas that cannot be replaced by many other silicon sources because of its high purity and ability to achieve fine control. Monosilane generates crystalline silicon through pyrolysis reaction, which is currently one of the methods for large-scale production of granular monocrystalline silicon and polycrystalline silicon in the world.

Silane characteristics

Silane (SiH4) is a colorless gas that reacts with air and causes suffocation. Its synonym is silicon hydride. The chemical formula of silane is SiH4, and its content is as high as 99.99%. At room temperature and pressure, silane is a foul-smelling toxic gas. The melting point of silane is -185℃ and the boiling point is -112℃. At room temperature, silane is stable, but when heated to 400℃, it will completely decompose into gaseous silicon and hydrogen. Silane is flammable and explosive, and it will burn explosively in air or halogen gas.

Application fields

Silane has a wide range of uses. In addition to being the most effective way to attach silicon molecules to the surface of the cell during the production of solar cells, it is also widely used in manufacturing plants such as semiconductors, flat panel displays, and coated glass.

Silane is the silicon source for chemical vapor deposition processes such as single crystal silicon, polycrystalline silicon epitaxial wafers, silicon dioxide, silicon nitride, and phosphosilicate glass in the semiconductor industry, and is widely used in the production and development of solar cells, silicon copier drums, photoelectric sensors, optical fibers, and special glass.

In recent years, high-tech applications of silanes are still emerging, including the manufacture of advanced ceramics, composite materials, functional materials, biomaterials, high-energy materials, etc., becoming the basis of many new technologies, new materials, and new devices.